FormFactor 150mm Wafer Probe Station

MPS150

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The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm.

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MPS150 Probe Station: The right solution to meet your technical specifications

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. Pre-configured application-focused probing solutions are available with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The MPS150 is the industry’s probe platform of choice.

  • Save Time
    • Ergonomic and straightforward design for comfortable and easy operation
  • Protect Investment
    • Easy reconfiguration and upgrades for a wide range of applications
  • Application Know-How
    • Get help from experts who are at the forefront of emerging technologies
    • Best known methods and over 30 years of application experience
  • Safety
    • TUEV proven standards and production quality

The MPS150 platform supports a wide variety of applications such as I-V/C-V, radio frequency (RF), millimeter-wave (mmW) and sub-THz measurements, device and wafer characterization tests (DWC), failure analysis (FA), submicron probing, MEMS, optoelectronic engineering tests and more. Its stable platen is designed to accommodate up to sixteen positioners, providing a function similar to a probe card for special wafer-level reliability (WLR) applications.

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