FormFactor CM300xi Probe System View larger

FormFactor CM300xi Probe System


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The Cascade Microtech CM300xi with Contact Intelligence technology meets the measurement challenges brought on by extremely complex environments.

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With the Contact Intelligence technology, the CM300xi senses, learns and reacts to multiple temperatures and small pad layouts, automatically adapting and adjusting to provide the most accurate probe-to-pad alignment for a broad array of wafers, materials and devices. Designed with scalability and flexibility, the CM300xi delivers measurement accuracy and reliability whether as a semi-automated or a fully-automated dual-prober system, for I-V/C-V, RTN and RF measurements over a broad thermal range.

Features and Benefits

  • The Contact Intelligence technology enables CM300xi to adapt to temperature variance and provide automated drift correction for unattended testing on small pads over time and temperature.
  • The High Thermal Stability (HTS) capabilities and VueTrack™ probe-to-pad alignment technology minimize the need of manual re-adjustment when probing small pads across multiple temperatures.
  • Velox™ probe station control software simplifies wafer loading operation, test automation and measurement system integration, while preventing damage of probe tips and probe cards throughout the entire measurement cycle.